12/18/2011	2:13:45 PM	Main Vac valve closed
12/18/2011	2:15:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	2:15:22 PM	Recipe started at 2:15 PM
12/18/2011	2:15:22 PM	Helium valve closed
12/18/2011	2:15:22 PM	H2 valve closed
12/18/2011	2:15:22 PM	BCl3 valve closed
12/18/2011	2:15:22 PM	PH3 valve closed
12/18/2011	2:15:22 PM	SiCl4 pre valve closed
12/18/2011	2:15:22 PM	SiCl4 post valve closed
12/18/2011	2:15:22 PM	Main Vac valve closed
12/18/2011	2:15:22 PM	Bubbler valve closed
12/18/2011	2:15:22 PM	Bypass valve opened
12/18/2011	2:15:22 PM	Helium MFC set to  0.000000
12/18/2011	2:15:22 PM	H2 MFC set to  0.000000
12/18/2011	2:15:22 PM	BCl3 MFC set to  0.000000
12/18/2011	2:15:22 PM	PHl3 MFC set to  0.000000
12/18/2011	2:15:22 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:15:22 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:15:22 PM	Tube furnace set to 0
12/18/2011	2:19:07 PM	Helium valve closed
12/18/2011	2:19:07 PM	H2 valve closed
12/18/2011	2:19:07 PM	BCl3 valve closed
12/18/2011	2:19:07 PM	PH3 valve closed
12/18/2011	2:19:07 PM	SiCl4 pre valve closed
12/18/2011	2:19:07 PM	SiCl4 post valve closed
12/18/2011	2:19:07 PM	Main Vac valve closed
12/18/2011	2:19:07 PM	Bubbler valve closed
12/18/2011	2:19:07 PM	Bypass valve opened
12/18/2011	2:19:07 PM	Helium MFC set to  0.000000
12/18/2011	2:19:07 PM	H2 MFC set to  0.000000
12/18/2011	2:19:07 PM	BCl3 MFC set to  0.000000
12/18/2011	2:19:07 PM	PHl3 MFC set to  0.000000
12/18/2011	2:19:07 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:19:07 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:19:07 PM	Tube furnace set to 0
12/18/2011	2:19:14 PM	Helium valve closed
12/18/2011	2:19:14 PM	H2 valve closed
12/18/2011	2:19:14 PM	BCl3 valve closed
12/18/2011	2:19:14 PM	PH3 valve closed
12/18/2011	2:19:14 PM	SiCl4 pre valve closed
12/18/2011	2:19:14 PM	SiCl4 post valve closed
12/18/2011	2:19:14 PM	Bypass valve closed
12/18/2011	2:19:14 PM	Bubbler valve closed
12/18/2011	2:19:14 PM	Main Vac valve opened
12/18/2011	2:19:14 PM	Helium MFC set to  0.000000
12/18/2011	2:19:14 PM	H2 MFC set to  0.000000
12/18/2011	2:19:14 PM	BCl3 MFC set to  0.000000
12/18/2011	2:19:14 PM	PHl3 MFC set to  0.000000
12/18/2011	2:19:14 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:19:14 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:19:14 PM	Tube furnace set to 0
12/18/2011	2:19:15 PM	Run finished at 2:19 PM
12/18/2011	2:19:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	2:32:42 PM	Helium MFC set to  500.000000
12/18/2011	2:32:43 PM	Main Vac valve closed
12/18/2011	2:32:45 PM	Helium valve opened
12/18/2011	2:33:35 PM	Helium valve closed
12/18/2011	2:33:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	2:33:37 PM	Recipe started at 2:33 PM
12/18/2011	2:33:37 PM	Helium valve closed
12/18/2011	2:33:37 PM	H2 valve closed
12/18/2011	2:33:37 PM	BCl3 valve closed
12/18/2011	2:33:37 PM	PH3 valve closed
12/18/2011	2:33:37 PM	SiCl4 pre valve closed
12/18/2011	2:33:37 PM	SiCl4 post valve closed
12/18/2011	2:33:37 PM	Main Vac valve closed
12/18/2011	2:33:37 PM	Bubbler valve closed
12/18/2011	2:33:37 PM	Bypass valve opened
12/18/2011	2:33:37 PM	Helium MFC set to  0.000000
12/18/2011	2:33:37 PM	H2 MFC set to  0.000000
12/18/2011	2:33:37 PM	BCl3 MFC set to  0.000000
12/18/2011	2:33:37 PM	PHl3 MFC set to  0.000000
12/18/2011	2:33:37 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:33:37 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:33:37 PM	Tube furnace set to 0
12/18/2011	2:35:22 PM	Helium valve closed
12/18/2011	2:35:22 PM	H2 valve closed
12/18/2011	2:35:22 PM	BCl3 valve closed
12/18/2011	2:35:23 PM	PH3 valve closed
12/18/2011	2:35:23 PM	SiCl4 pre valve closed
12/18/2011	2:35:23 PM	SiCl4 post valve closed
12/18/2011	2:35:23 PM	Main Vac valve closed
12/18/2011	2:35:23 PM	Bubbler valve closed
12/18/2011	2:35:23 PM	Bypass valve opened
12/18/2011	2:35:23 PM	Helium MFC set to  0.000000
12/18/2011	2:35:23 PM	H2 MFC set to  0.000000
12/18/2011	2:35:23 PM	BCl3 MFC set to  0.000000
12/18/2011	2:35:23 PM	PHl3 MFC set to  0.000000
12/18/2011	2:35:23 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:35:23 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:35:23 PM	Tube furnace set to 0
12/18/2011	2:36:23 PM	Helium valve closed
12/18/2011	2:36:23 PM	H2 valve closed
12/18/2011	2:36:23 PM	BCl3 valve closed
12/18/2011	2:36:23 PM	PH3 valve closed
12/18/2011	2:36:23 PM	SiCl4 pre valve closed
12/18/2011	2:36:23 PM	SiCl4 post valve closed
12/18/2011	2:36:23 PM	Bypass valve closed
12/18/2011	2:36:23 PM	Bubbler valve closed
12/18/2011	2:36:23 PM	Main Vac valve opened
12/18/2011	2:36:23 PM	Helium MFC set to  0.000000
12/18/2011	2:36:23 PM	H2 MFC set to  0.000000
12/18/2011	2:36:23 PM	BCl3 MFC set to  0.000000
12/18/2011	2:36:23 PM	PHl3 MFC set to  0.000000
12/18/2011	2:36:23 PM	SiCl4 MFC set to  0.000000
12/18/2011	2:36:23 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	2:36:23 PM	Tube furnace set to 0
12/18/2011	2:36:24 PM	Run finished at 2:36 PM
12/18/2011	2:36:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	5:46:48 PM	Main Vac valve closed
12/18/2011	5:48:34 PM	Main Vac valve opened
12/18/2011	5:50:53 PM	Recipe started at 5:50 PM
12/18/2011	5:50:53 PM	Helium valve closed
12/18/2011	5:50:53 PM	H2 valve closed
12/18/2011	5:50:53 PM	BCl3 valve closed
12/18/2011	5:50:53 PM	PH3 valve closed
12/18/2011	5:50:53 PM	SiCl4 pre valve closed
12/18/2011	5:50:53 PM	SiCl4 post valve closed
12/18/2011	5:50:53 PM	Main Vac valve closed
12/18/2011	5:50:53 PM	Bypass valve closed
12/18/2011	5:50:53 PM	Bubbler valve closed
12/18/2011	5:50:53 PM	Helium MFC set to  0.000000
12/18/2011	5:50:53 PM	H2 MFC set to  0.000000
12/18/2011	5:50:53 PM	BCl3 MFC set to  0.000000
12/18/2011	5:50:53 PM	PHl3 MFC set to  0.000000
12/18/2011	5:50:53 PM	SiCl4 MFC set to  0.000000
12/18/2011	5:50:53 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	5:50:53 PM	Tube furnace set to 0
12/18/2011	5:50:56 PM	Helium valve closed
12/18/2011	5:50:56 PM	BCl3 valve closed
12/18/2011	5:50:56 PM	PH3 valve closed
12/18/2011	5:50:56 PM	SiCl4 pre valve closed
12/18/2011	5:50:56 PM	SiCl4 post valve closed
12/18/2011	5:50:56 PM	Main Vac valve closed
12/18/2011	5:50:56 PM	Bypass valve closed
12/18/2011	5:50:56 PM	Bubbler valve closed
12/18/2011	5:50:56 PM	H2 valve opened
12/18/2011	5:50:56 PM	Helium MFC set to  0.000000
12/18/2011	5:50:56 PM	H2 MFC set to  500.000000
12/18/2011	5:50:56 PM	BCl3 MFC set to  0.000000
12/18/2011	5:50:56 PM	PHl3 MFC set to  0.000000
12/18/2011	5:50:56 PM	SiCl4 MFC set to  0.000000
12/18/2011	5:50:56 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	5:50:57 PM	Tube furnace set to 0
12/18/2011	5:52:04 PM	Helium valve closed
12/18/2011	5:52:04 PM	BCl3 valve closed
12/18/2011	5:52:04 PM	PH3 valve closed
12/18/2011	5:52:04 PM	SiCl4 pre valve closed
12/18/2011	5:52:04 PM	SiCl4 post valve closed
12/18/2011	5:52:04 PM	Main Vac valve closed
12/18/2011	5:52:04 PM	Bypass valve closed
12/18/2011	5:52:04 PM	H2 valve opened
12/18/2011	5:52:04 PM	Bubbler valve opened
12/18/2011	5:52:04 PM	Helium MFC set to  0.000000
12/18/2011	5:52:04 PM	H2 MFC set to  500.000000
12/18/2011	5:52:04 PM	BCl3 MFC set to  0.000000
12/18/2011	5:52:04 PM	PHl3 MFC set to  0.000000
12/18/2011	5:52:04 PM	SiCl4 MFC set to  0.000000
12/18/2011	5:52:04 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	5:52:04 PM	Tube furnace set to 0
12/18/2011	5:52:05 PM	Helium valve closed
12/18/2011	5:52:05 PM	BCl3 valve closed
12/18/2011	5:52:05 PM	PH3 valve closed
12/18/2011	5:52:05 PM	SiCl4 pre valve closed
12/18/2011	5:52:05 PM	SiCl4 post valve closed
12/18/2011	5:52:05 PM	Main Vac valve closed
12/18/2011	5:52:05 PM	Bypass valve closed
12/18/2011	5:52:05 PM	H2 valve opened
12/18/2011	5:52:06 PM	Bubbler valve opened
12/18/2011	5:52:06 PM	Helium MFC set to  0.000000
12/18/2011	5:52:06 PM	H2 MFC set to  500.000000
12/18/2011	5:52:06 PM	BCl3 MFC set to  0.000000
12/18/2011	5:52:06 PM	PHl3 MFC set to  0.000000
12/18/2011	5:52:06 PM	SiCl4 MFC set to  0.000000
12/18/2011	5:52:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	5:52:06 PM	Tube furnace set to 1000
12/18/2011	6:12:06 PM	Helium valve closed
12/18/2011	6:12:06 PM	BCl3 valve closed
12/18/2011	6:12:06 PM	PH3 valve closed
12/18/2011	6:12:06 PM	Main Vac valve closed
12/18/2011	6:12:06 PM	Bypass valve closed
12/18/2011	6:12:06 PM	H2 valve opened
12/18/2011	6:12:06 PM	SiCl4 pre valve opened
12/18/2011	6:12:06 PM	SiCl4 post valve opened
12/18/2011	6:12:06 PM	Bubbler valve opened
12/18/2011	6:12:06 PM	Helium MFC set to  0.000000
12/18/2011	6:12:06 PM	H2 MFC set to  500.000000
12/18/2011	6:12:06 PM	BCl3 MFC set to  0.000000
12/18/2011	6:12:06 PM	PHl3 MFC set to  0.000000
12/18/2011	6:12:06 PM	SiCl4 MFC set to  44.000000
12/18/2011	6:12:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	6:12:06 PM	Tube furnace set to 1000
12/18/2011	6:32:06 PM	Helium valve closed
12/18/2011	6:32:06 PM	BCl3 valve closed
12/18/2011	6:32:06 PM	PH3 valve closed
12/18/2011	6:32:06 PM	SiCl4 pre valve closed
12/18/2011	6:32:06 PM	SiCl4 post valve closed
12/18/2011	6:32:06 PM	Main Vac valve closed
12/18/2011	6:32:06 PM	Bypass valve closed
12/18/2011	6:32:06 PM	H2 valve opened
12/18/2011	6:32:06 PM	Bubbler valve opened
12/18/2011	6:32:06 PM	Helium MFC set to  0.000000
12/18/2011	6:32:06 PM	H2 MFC set to  500.000000
12/18/2011	6:32:06 PM	BCl3 MFC set to  0.000000
12/18/2011	6:32:06 PM	PHl3 MFC set to  0.000000
12/18/2011	6:32:06 PM	SiCl4 MFC set to  0.000000
12/18/2011	6:32:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	6:32:06 PM	Tube furnace set to 950
12/18/2011	6:37:06 PM	Helium valve closed
12/18/2011	6:37:06 PM	BCl3 valve closed
12/18/2011	6:37:06 PM	PH3 valve closed
12/18/2011	6:37:06 PM	SiCl4 pre valve closed
12/18/2011	6:37:06 PM	SiCl4 post valve closed
12/18/2011	6:37:06 PM	Main Vac valve closed
12/18/2011	6:37:06 PM	Bypass valve closed
12/18/2011	6:37:06 PM	H2 valve opened
12/18/2011	6:37:06 PM	Bubbler valve opened
12/18/2011	6:37:06 PM	Helium MFC set to  0.000000
12/18/2011	6:37:06 PM	H2 MFC set to  500.000000
12/18/2011	6:37:06 PM	BCl3 MFC set to  0.000000
12/18/2011	6:37:06 PM	PHl3 MFC set to  0.000000
12/18/2011	6:37:06 PM	SiCl4 MFC set to  0.000000
12/18/2011	6:37:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	6:37:06 PM	Tube furnace set to 850
12/18/2011	6:42:06 PM	H2 valve closed
12/18/2011	6:42:06 PM	BCl3 valve closed
12/18/2011	6:42:06 PM	PH3 valve closed
12/18/2011	6:42:06 PM	SiCl4 pre valve closed
12/18/2011	6:42:06 PM	SiCl4 post valve closed
12/18/2011	6:42:06 PM	Main Vac valve closed
12/18/2011	6:42:06 PM	Bypass valve closed
12/18/2011	6:42:06 PM	Helium valve opened
12/18/2011	6:42:06 PM	Bubbler valve opened
12/18/2011	6:42:06 PM	Helium MFC set to  500.000000
12/18/2011	6:42:06 PM	H2 MFC set to  0.000000
12/18/2011	6:42:06 PM	BCl3 MFC set to  0.000000
12/18/2011	6:42:06 PM	PHl3 MFC set to  0.000000
12/18/2011	6:42:06 PM	SiCl4 MFC set to  0.000000
12/18/2011	6:42:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	6:42:06 PM	Tube furnace set to 0
12/18/2011	7:22:06 PM	Helium valve closed
12/18/2011	7:22:06 PM	H2 valve closed
12/18/2011	7:22:06 PM	BCl3 valve closed
12/18/2011	7:22:06 PM	PH3 valve closed
12/18/2011	7:22:06 PM	SiCl4 pre valve closed
12/18/2011	7:22:06 PM	SiCl4 post valve closed
12/18/2011	7:22:06 PM	Main Vac valve closed
12/18/2011	7:22:06 PM	Bypass valve closed
12/18/2011	7:22:06 PM	Bubbler valve closed
12/18/2011	7:22:06 PM	Helium MFC set to  0.000000
12/18/2011	7:22:06 PM	H2 MFC set to  0.000000
12/18/2011	7:22:06 PM	BCl3 MFC set to  0.000000
12/18/2011	7:22:06 PM	PHl3 MFC set to  0.000000
12/18/2011	7:22:06 PM	SiCl4 MFC set to  0.000000
12/18/2011	7:22:06 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	7:22:06 PM	Tube furnace set to 0
12/18/2011	7:22:07 PM	Run finished at 7:22 PM
12/18/2011	7:26:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	7:26:20 PM	Recipe started at 7:26 PM
12/18/2011	7:26:20 PM	Helium valve closed
12/18/2011	7:26:20 PM	H2 valve closed
12/18/2011	7:26:20 PM	BCl3 valve closed
12/18/2011	7:26:20 PM	PH3 valve closed
12/18/2011	7:26:20 PM	SiCl4 pre valve closed
12/18/2011	7:26:21 PM	SiCl4 post valve closed
12/18/2011	7:26:21 PM	Main Vac valve closed
12/18/2011	7:26:21 PM	Bubbler valve closed
12/18/2011	7:26:21 PM	Bypass valve opened
12/18/2011	7:26:21 PM	Helium MFC set to  0.000000
12/18/2011	7:26:21 PM	H2 MFC set to  0.000000
12/18/2011	7:26:21 PM	BCl3 MFC set to  0.000000
12/18/2011	7:26:21 PM	PHl3 MFC set to  0.000000
12/18/2011	7:26:21 PM	SiCl4 MFC set to  0.000000
12/18/2011	7:26:21 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	7:26:21 PM	Tube furnace set to 0
12/18/2011	7:28:24 PM	Helium valve closed
12/18/2011	7:28:24 PM	H2 valve closed
12/18/2011	7:28:24 PM	BCl3 valve closed
12/18/2011	7:28:24 PM	PH3 valve closed
12/18/2011	7:28:24 PM	SiCl4 pre valve closed
12/18/2011	7:28:24 PM	SiCl4 post valve closed
12/18/2011	7:28:24 PM	Main Vac valve closed
12/18/2011	7:28:24 PM	Bubbler valve closed
12/18/2011	7:28:24 PM	Bypass valve opened
12/18/2011	7:28:24 PM	Helium MFC set to  0.000000
12/18/2011	7:28:24 PM	H2 MFC set to  0.000000
12/18/2011	7:28:24 PM	BCl3 MFC set to  0.000000
12/18/2011	7:28:24 PM	PHl3 MFC set to  0.000000
12/18/2011	7:28:24 PM	SiCl4 MFC set to  0.000000
12/18/2011	7:28:24 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	7:28:24 PM	Tube furnace set to 0
12/18/2011	7:29:24 PM	Helium valve closed
12/18/2011	7:29:24 PM	H2 valve closed
12/18/2011	7:29:24 PM	BCl3 valve closed
12/18/2011	7:29:24 PM	PH3 valve closed
12/18/2011	7:29:24 PM	SiCl4 pre valve closed
12/18/2011	7:29:24 PM	SiCl4 post valve closed
12/18/2011	7:29:24 PM	Bypass valve closed
12/18/2011	7:29:24 PM	Bubbler valve closed
12/18/2011	7:29:24 PM	Main Vac valve opened
12/18/2011	7:29:24 PM	Helium MFC set to  0.000000
12/18/2011	7:29:24 PM	H2 MFC set to  0.000000
12/18/2011	7:29:24 PM	BCl3 MFC set to  0.000000
12/18/2011	7:29:24 PM	PHl3 MFC set to  0.000000
12/18/2011	7:29:24 PM	SiCl4 MFC set to  0.000000
12/18/2011	7:29:24 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	7:29:24 PM	Tube furnace set to 0
12/18/2011	7:29:25 PM	Run finished at 7:29 PM
12/18/2011	7:29:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	8:03:16 PM	Main Vac valve closed
12/18/2011	8:03:20 PM	Helium MFC set to  500.000000
12/18/2011	8:03:20 PM	Helium valve opened
12/18/2011	8:04:10 PM	Helium valve closed
12/18/2011	8:04:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	8:04:13 PM	Recipe started at 8:04 PM
12/18/2011	8:04:13 PM	Helium valve closed
12/18/2011	8:04:13 PM	H2 valve closed
12/18/2011	8:04:13 PM	BCl3 valve closed
12/18/2011	8:04:13 PM	PH3 valve closed
12/18/2011	8:04:13 PM	SiCl4 pre valve closed
12/18/2011	8:04:13 PM	SiCl4 post valve closed
12/18/2011	8:04:13 PM	Main Vac valve closed
12/18/2011	8:04:13 PM	Bubbler valve closed
12/18/2011	8:04:13 PM	Bypass valve opened
12/18/2011	8:04:13 PM	Helium MFC set to  0.000000
12/18/2011	8:04:13 PM	H2 MFC set to  0.000000
12/18/2011	8:04:13 PM	BCl3 MFC set to  0.000000
12/18/2011	8:04:13 PM	PHl3 MFC set to  0.000000
12/18/2011	8:04:13 PM	SiCl4 MFC set to  0.000000
12/18/2011	8:04:13 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	8:04:14 PM	Tube furnace set to 0
12/18/2011	8:05:15 PM	Helium valve closed
12/18/2011	8:05:15 PM	H2 valve closed
12/18/2011	8:05:15 PM	BCl3 valve closed
12/18/2011	8:05:15 PM	PH3 valve closed
12/18/2011	8:05:15 PM	SiCl4 pre valve closed
12/18/2011	8:05:15 PM	SiCl4 post valve closed
12/18/2011	8:05:15 PM	Main Vac valve closed
12/18/2011	8:05:15 PM	Bubbler valve closed
12/18/2011	8:05:15 PM	Bypass valve opened
12/18/2011	8:05:15 PM	Helium MFC set to  0.000000
12/18/2011	8:05:15 PM	H2 MFC set to  0.000000
12/18/2011	8:05:15 PM	BCl3 MFC set to  0.000000
12/18/2011	8:05:15 PM	PHl3 MFC set to  0.000000
12/18/2011	8:05:15 PM	SiCl4 MFC set to  0.000000
12/18/2011	8:05:15 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	8:05:16 PM	Tube furnace set to 0
12/18/2011	8:05:21 PM	Helium valve closed
12/18/2011	8:05:21 PM	H2 valve closed
12/18/2011	8:05:21 PM	BCl3 valve closed
12/18/2011	8:05:21 PM	PH3 valve closed
12/18/2011	8:05:21 PM	SiCl4 pre valve closed
12/18/2011	8:05:21 PM	SiCl4 post valve closed
12/18/2011	8:05:21 PM	Bypass valve closed
12/18/2011	8:05:21 PM	Bubbler valve closed
12/18/2011	8:05:21 PM	Main Vac valve opened
12/18/2011	8:05:21 PM	Helium MFC set to  0.000000
12/18/2011	8:05:21 PM	H2 MFC set to  0.000000
12/18/2011	8:05:21 PM	BCl3 MFC set to  0.000000
12/18/2011	8:05:21 PM	PHl3 MFC set to  0.000000
12/18/2011	8:05:21 PM	SiCl4 MFC set to  0.000000
12/18/2011	8:05:21 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	8:05:21 PM	Tube furnace set to 0
12/18/2011	8:05:22 PM	Run finished at 8:05 PM
12/18/2011	8:05:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	8:15:41 PM	Main Vac valve closed
12/18/2011	8:15:50 PM	Main Vac valve opened
12/18/2011	9:11:30 PM	Recipe started at 9:11 PM
12/18/2011	9:11:30 PM	Helium valve closed
12/18/2011	9:11:30 PM	H2 valve closed
12/18/2011	9:11:30 PM	BCl3 valve closed
12/18/2011	9:11:30 PM	PH3 valve closed
12/18/2011	9:11:30 PM	SiCl4 pre valve closed
12/18/2011	9:11:30 PM	SiCl4 post valve closed
12/18/2011	9:11:30 PM	Main Vac valve closed
12/18/2011	9:11:30 PM	Bypass valve closed
12/18/2011	9:11:30 PM	Bubbler valve closed
12/18/2011	9:11:30 PM	Helium MFC set to  0.000000
12/18/2011	9:11:30 PM	H2 MFC set to  0.000000
12/18/2011	9:11:30 PM	BCl3 MFC set to  0.000000
12/18/2011	9:11:30 PM	PHl3 MFC set to  0.000000
12/18/2011	9:11:30 PM	SiCl4 MFC set to  0.000000
12/18/2011	9:11:30 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:11:30 PM	Tube furnace set to 0
12/18/2011	9:11:33 PM	Helium valve closed
12/18/2011	9:11:33 PM	BCl3 valve closed
12/18/2011	9:11:33 PM	PH3 valve closed
12/18/2011	9:11:33 PM	SiCl4 pre valve closed
12/18/2011	9:11:33 PM	SiCl4 post valve closed
12/18/2011	9:11:33 PM	Main Vac valve closed
12/18/2011	9:11:33 PM	Bypass valve closed
12/18/2011	9:11:33 PM	Bubbler valve closed
12/18/2011	9:11:33 PM	H2 valve opened
12/18/2011	9:11:33 PM	Helium MFC set to  0.000000
12/18/2011	9:11:33 PM	H2 MFC set to  500.000000
12/18/2011	9:11:33 PM	BCl3 MFC set to  0.000000
12/18/2011	9:11:33 PM	PHl3 MFC set to  0.000000
12/18/2011	9:11:33 PM	SiCl4 MFC set to  0.000000
12/18/2011	9:11:33 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:11:34 PM	Tube furnace set to 0
12/18/2011	9:12:43 PM	Helium valve closed
12/18/2011	9:12:43 PM	BCl3 valve closed
12/18/2011	9:12:43 PM	PH3 valve closed
12/18/2011	9:12:43 PM	SiCl4 pre valve closed
12/18/2011	9:12:43 PM	SiCl4 post valve closed
12/18/2011	9:12:43 PM	Main Vac valve closed
12/18/2011	9:12:43 PM	Bypass valve closed
12/18/2011	9:12:43 PM	H2 valve opened
12/18/2011	9:12:43 PM	Bubbler valve opened
12/18/2011	9:12:43 PM	Helium MFC set to  0.000000
12/18/2011	9:12:43 PM	H2 MFC set to  500.000000
12/18/2011	9:12:43 PM	BCl3 MFC set to  0.000000
12/18/2011	9:12:43 PM	PHl3 MFC set to  0.000000
12/18/2011	9:12:43 PM	SiCl4 MFC set to  0.000000
12/18/2011	9:12:43 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:12:43 PM	Tube furnace set to 0
12/18/2011	9:12:44 PM	Helium valve closed
12/18/2011	9:12:44 PM	BCl3 valve closed
12/18/2011	9:12:44 PM	PH3 valve closed
12/18/2011	9:12:44 PM	SiCl4 pre valve closed
12/18/2011	9:12:44 PM	SiCl4 post valve closed
12/18/2011	9:12:44 PM	Main Vac valve closed
12/18/2011	9:12:44 PM	Bypass valve closed
12/18/2011	9:12:44 PM	H2 valve opened
12/18/2011	9:12:44 PM	Bubbler valve opened
12/18/2011	9:12:44 PM	Helium MFC set to  0.000000
12/18/2011	9:12:44 PM	H2 MFC set to  500.000000
12/18/2011	9:12:44 PM	BCl3 MFC set to  0.000000
12/18/2011	9:12:44 PM	PHl3 MFC set to  0.000000
12/18/2011	9:12:44 PM	SiCl4 MFC set to  0.000000
12/18/2011	9:12:44 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:12:44 PM	Tube furnace set to 1000
12/18/2011	9:32:44 PM	Helium valve closed
12/18/2011	9:32:44 PM	BCl3 valve closed
12/18/2011	9:32:44 PM	PH3 valve closed
12/18/2011	9:32:44 PM	Main Vac valve closed
12/18/2011	9:32:44 PM	Bypass valve closed
12/18/2011	9:32:44 PM	H2 valve opened
12/18/2011	9:32:44 PM	SiCl4 pre valve opened
12/18/2011	9:32:44 PM	SiCl4 post valve opened
12/18/2011	9:32:44 PM	Bubbler valve opened
12/18/2011	9:32:44 PM	Helium MFC set to  0.000000
12/18/2011	9:32:44 PM	H2 MFC set to  500.000000
12/18/2011	9:32:44 PM	BCl3 MFC set to  0.000000
12/18/2011	9:32:44 PM	PHl3 MFC set to  0.000000
12/18/2011	9:32:44 PM	SiCl4 MFC set to  50.000000
12/18/2011	9:32:44 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:32:44 PM	Tube furnace set to 1000
12/18/2011	9:57:44 PM	Helium valve closed
12/18/2011	9:57:44 PM	BCl3 valve closed
12/18/2011	9:57:44 PM	PH3 valve closed
12/18/2011	9:57:44 PM	SiCl4 pre valve closed
12/18/2011	9:57:44 PM	SiCl4 post valve closed
12/18/2011	9:57:44 PM	Main Vac valve closed
12/18/2011	9:57:44 PM	Bypass valve closed
12/18/2011	9:57:44 PM	H2 valve opened
12/18/2011	9:57:44 PM	Bubbler valve opened
12/18/2011	9:57:44 PM	Helium MFC set to  0.000000
12/18/2011	9:57:44 PM	H2 MFC set to  500.000000
12/18/2011	9:57:44 PM	BCl3 MFC set to  0.000000
12/18/2011	9:57:44 PM	PHl3 MFC set to  0.000000
12/18/2011	9:57:44 PM	SiCl4 MFC set to  0.000000
12/18/2011	9:57:44 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	9:57:44 PM	Tube furnace set to 950
12/18/2011	10:02:44 PM	Helium valve closed
12/18/2011	10:02:44 PM	BCl3 valve closed
12/18/2011	10:02:44 PM	PH3 valve closed
12/18/2011	10:02:44 PM	SiCl4 pre valve closed
12/18/2011	10:02:44 PM	SiCl4 post valve closed
12/18/2011	10:02:44 PM	Main Vac valve closed
12/18/2011	10:02:44 PM	Bypass valve closed
12/18/2011	10:02:44 PM	H2 valve opened
12/18/2011	10:02:44 PM	Bubbler valve opened
12/18/2011	10:02:44 PM	Helium MFC set to  0.000000
12/18/2011	10:02:44 PM	H2 MFC set to  500.000000
12/18/2011	10:02:44 PM	BCl3 MFC set to  0.000000
12/18/2011	10:02:44 PM	PHl3 MFC set to  0.000000
12/18/2011	10:02:44 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:02:44 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:02:45 PM	Tube furnace set to 850
12/18/2011	10:07:45 PM	H2 valve closed
12/18/2011	10:07:45 PM	BCl3 valve closed
12/18/2011	10:07:45 PM	PH3 valve closed
12/18/2011	10:07:45 PM	SiCl4 pre valve closed
12/18/2011	10:07:45 PM	SiCl4 post valve closed
12/18/2011	10:07:45 PM	Main Vac valve closed
12/18/2011	10:07:45 PM	Bypass valve closed
12/18/2011	10:07:45 PM	Helium valve opened
12/18/2011	10:07:45 PM	Bubbler valve opened
12/18/2011	10:07:45 PM	Helium MFC set to  500.000000
12/18/2011	10:07:45 PM	H2 MFC set to  0.000000
12/18/2011	10:07:45 PM	BCl3 MFC set to  0.000000
12/18/2011	10:07:45 PM	PHl3 MFC set to  0.000000
12/18/2011	10:07:45 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:07:45 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:07:45 PM	Tube furnace set to 0
12/18/2011	10:39:17 PM	Helium valve closed
12/18/2011	10:39:17 PM	H2 valve closed
12/18/2011	10:39:17 PM	BCl3 valve closed
12/18/2011	10:39:17 PM	PH3 valve closed
12/18/2011	10:39:17 PM	SiCl4 pre valve closed
12/18/2011	10:39:17 PM	SiCl4 post valve closed
12/18/2011	10:39:17 PM	Main Vac valve closed
12/18/2011	10:39:17 PM	Bypass valve closed
12/18/2011	10:39:17 PM	Bubbler valve closed
12/18/2011	10:39:17 PM	Helium MFC set to  0.000000
12/18/2011	10:39:17 PM	H2 MFC set to  0.000000
12/18/2011	10:39:17 PM	BCl3 MFC set to  0.000000
12/18/2011	10:39:17 PM	PHl3 MFC set to  0.000000
12/18/2011	10:39:17 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:39:17 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:39:17 PM	Tube furnace set to 0
12/18/2011	10:39:18 PM	Run finished at 10:39 PM
12/18/2011	10:41:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	10:41:01 PM	Recipe started at 10:41 PM
12/18/2011	10:41:01 PM	Helium valve closed
12/18/2011	10:41:01 PM	H2 valve closed
12/18/2011	10:41:01 PM	BCl3 valve closed
12/18/2011	10:41:01 PM	PH3 valve closed
12/18/2011	10:41:01 PM	SiCl4 pre valve closed
12/18/2011	10:41:01 PM	SiCl4 post valve closed
12/18/2011	10:41:01 PM	Main Vac valve closed
12/18/2011	10:41:01 PM	Bubbler valve closed
12/18/2011	10:41:01 PM	Bypass valve opened
12/18/2011	10:41:01 PM	Helium MFC set to  0.000000
12/18/2011	10:41:01 PM	H2 MFC set to  0.000000
12/18/2011	10:41:01 PM	BCl3 MFC set to  0.000000
12/18/2011	10:41:01 PM	PHl3 MFC set to  0.000000
12/18/2011	10:41:01 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:41:01 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:41:01 PM	Tube furnace set to 0
12/18/2011	10:43:24 PM	Helium valve closed
12/18/2011	10:43:24 PM	H2 valve closed
12/18/2011	10:43:24 PM	BCl3 valve closed
12/18/2011	10:43:24 PM	PH3 valve closed
12/18/2011	10:43:24 PM	SiCl4 pre valve closed
12/18/2011	10:43:24 PM	SiCl4 post valve closed
12/18/2011	10:43:24 PM	Main Vac valve closed
12/18/2011	10:43:24 PM	Bubbler valve closed
12/18/2011	10:43:24 PM	Bypass valve opened
12/18/2011	10:43:24 PM	Helium MFC set to  0.000000
12/18/2011	10:43:24 PM	H2 MFC set to  0.000000
12/18/2011	10:43:24 PM	BCl3 MFC set to  0.000000
12/18/2011	10:43:24 PM	PHl3 MFC set to  0.000000
12/18/2011	10:43:24 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:43:24 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:43:24 PM	Tube furnace set to 0
12/18/2011	10:44:24 PM	Helium valve closed
12/18/2011	10:44:24 PM	H2 valve closed
12/18/2011	10:44:24 PM	BCl3 valve closed
12/18/2011	10:44:24 PM	PH3 valve closed
12/18/2011	10:44:24 PM	SiCl4 pre valve closed
12/18/2011	10:44:24 PM	SiCl4 post valve closed
12/18/2011	10:44:24 PM	Bypass valve closed
12/18/2011	10:44:24 PM	Bubbler valve closed
12/18/2011	10:44:24 PM	Main Vac valve opened
12/18/2011	10:44:24 PM	Helium MFC set to  0.000000
12/18/2011	10:44:24 PM	H2 MFC set to  0.000000
12/18/2011	10:44:24 PM	BCl3 MFC set to  0.000000
12/18/2011	10:44:24 PM	PHl3 MFC set to  0.000000
12/18/2011	10:44:24 PM	SiCl4 MFC set to  0.000000
12/18/2011	10:44:24 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	10:44:25 PM	Tube furnace set to 0
12/18/2011	10:44:26 PM	Run finished at 10:44 PM
12/18/2011	10:44:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	11:05:04 PM	Main Vac valve closed
12/18/2011	11:05:07 PM	Helium MFC set to  500.000000
12/18/2011	11:05:08 PM	Helium valve opened
12/18/2011	11:06:11 PM	Helium valve closed
12/18/2011	11:06:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	11:06:13 PM	Recipe started at 11:06 PM
12/18/2011	11:06:13 PM	Helium valve closed
12/18/2011	11:06:13 PM	H2 valve closed
12/18/2011	11:06:13 PM	BCl3 valve closed
12/18/2011	11:06:13 PM	PH3 valve closed
12/18/2011	11:06:13 PM	SiCl4 pre valve closed
12/18/2011	11:06:13 PM	SiCl4 post valve closed
12/18/2011	11:06:13 PM	Main Vac valve closed
12/18/2011	11:06:13 PM	Bubbler valve closed
12/18/2011	11:06:13 PM	Bypass valve opened
12/18/2011	11:06:13 PM	Helium MFC set to  0.000000
12/18/2011	11:06:13 PM	H2 MFC set to  0.000000
12/18/2011	11:06:13 PM	BCl3 MFC set to  0.000000
12/18/2011	11:06:13 PM	PHl3 MFC set to  0.000000
12/18/2011	11:06:13 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:06:13 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:06:13 PM	Tube furnace set to 0
12/18/2011	11:07:57 PM	Helium valve closed
12/18/2011	11:07:57 PM	H2 valve closed
12/18/2011	11:07:57 PM	BCl3 valve closed
12/18/2011	11:07:57 PM	PH3 valve closed
12/18/2011	11:07:57 PM	SiCl4 pre valve closed
12/18/2011	11:07:57 PM	SiCl4 post valve closed
12/18/2011	11:07:57 PM	Main Vac valve closed
12/18/2011	11:07:57 PM	Bubbler valve closed
12/18/2011	11:07:57 PM	Bypass valve opened
12/18/2011	11:07:57 PM	Helium MFC set to  0.000000
12/18/2011	11:07:57 PM	H2 MFC set to  0.000000
12/18/2011	11:07:57 PM	BCl3 MFC set to  0.000000
12/18/2011	11:07:57 PM	PHl3 MFC set to  0.000000
12/18/2011	11:07:57 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:07:57 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:07:57 PM	Tube furnace set to 0
12/18/2011	11:08:57 PM	Helium valve closed
12/18/2011	11:08:57 PM	H2 valve closed
12/18/2011	11:08:57 PM	BCl3 valve closed
12/18/2011	11:08:57 PM	PH3 valve closed
12/18/2011	11:08:57 PM	SiCl4 pre valve closed
12/18/2011	11:08:57 PM	SiCl4 post valve closed
12/18/2011	11:08:57 PM	Bypass valve closed
12/18/2011	11:08:57 PM	Bubbler valve closed
12/18/2011	11:08:57 PM	Main Vac valve opened
12/18/2011	11:08:57 PM	Helium MFC set to  0.000000
12/18/2011	11:08:57 PM	H2 MFC set to  0.000000
12/18/2011	11:08:57 PM	BCl3 MFC set to  0.000000
12/18/2011	11:08:57 PM	PHl3 MFC set to  0.000000
12/18/2011	11:08:57 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:08:57 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:08:57 PM	Tube furnace set to 0
12/18/2011	11:08:58 PM	Run finished at 11:08 PM
12/18/2011	11:08:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	11:46:24 PM	Main Vac valve closed
12/18/2011	11:46:35 PM	Main Vac valve opened
12/18/2011	11:46:44 PM	Main Vac valve closed
12/18/2011	11:46:49 PM	Helium MFC set to  500.000000
12/18/2011	11:46:50 PM	Helium valve opened
12/18/2011	11:47:48 PM	Helium valve closed
12/18/2011	11:47:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2011	11:47:50 PM	Recipe started at 11:47 PM
12/18/2011	11:47:50 PM	Helium valve closed
12/18/2011	11:47:50 PM	H2 valve closed
12/18/2011	11:47:50 PM	BCl3 valve closed
12/18/2011	11:47:50 PM	PH3 valve closed
12/18/2011	11:47:50 PM	SiCl4 pre valve closed
12/18/2011	11:47:50 PM	SiCl4 post valve closed
12/18/2011	11:47:50 PM	Main Vac valve closed
12/18/2011	11:47:50 PM	Bubbler valve closed
12/18/2011	11:47:50 PM	Bypass valve opened
12/18/2011	11:47:50 PM	Helium MFC set to  0.000000
12/18/2011	11:47:50 PM	H2 MFC set to  0.000000
12/18/2011	11:47:50 PM	BCl3 MFC set to  0.000000
12/18/2011	11:47:50 PM	PHl3 MFC set to  0.000000
12/18/2011	11:47:50 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:47:50 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:47:50 PM	Tube furnace set to 0
12/18/2011	11:49:42 PM	Helium valve closed
12/18/2011	11:49:42 PM	H2 valve closed
12/18/2011	11:49:42 PM	BCl3 valve closed
12/18/2011	11:49:42 PM	PH3 valve closed
12/18/2011	11:49:42 PM	SiCl4 pre valve closed
12/18/2011	11:49:42 PM	SiCl4 post valve closed
12/18/2011	11:49:42 PM	Main Vac valve closed
12/18/2011	11:49:42 PM	Bubbler valve closed
12/18/2011	11:49:42 PM	Bypass valve opened
12/18/2011	11:49:42 PM	Helium MFC set to  0.000000
12/18/2011	11:49:42 PM	H2 MFC set to  0.000000
12/18/2011	11:49:42 PM	BCl3 MFC set to  0.000000
12/18/2011	11:49:42 PM	PHl3 MFC set to  0.000000
12/18/2011	11:49:42 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:49:42 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:49:43 PM	Tube furnace set to 0
12/18/2011	11:50:43 PM	Helium valve closed
12/18/2011	11:50:43 PM	H2 valve closed
12/18/2011	11:50:43 PM	BCl3 valve closed
12/18/2011	11:50:43 PM	PH3 valve closed
12/18/2011	11:50:43 PM	SiCl4 pre valve closed
12/18/2011	11:50:43 PM	SiCl4 post valve closed
12/18/2011	11:50:43 PM	Bypass valve closed
12/18/2011	11:50:43 PM	Bubbler valve closed
12/18/2011	11:50:43 PM	Main Vac valve opened
12/18/2011	11:50:43 PM	Helium MFC set to  0.000000
12/18/2011	11:50:43 PM	H2 MFC set to  0.000000
12/18/2011	11:50:43 PM	BCl3 MFC set to  0.000000
12/18/2011	11:50:43 PM	PHl3 MFC set to  0.000000
12/18/2011	11:50:43 PM	SiCl4 MFC set to  0.000000
12/18/2011	11:50:43 PM	Bypass solenoid MFC set to  0.000000
12/18/2011	11:50:43 PM	Tube furnace set to 0
12/18/2011	11:50:44 PM	Run finished at 11:50 PM
12/18/2011	11:50:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
